Nova Pushing the Limits of 3D Profile Metrology With New Optical CD System
Poster: SySAdmin
Posted on July 11, 2011 at 4:07:01 AM
Nova Pushing the Limits of 3D Profile Metrology With New Optical CD System
Introducing the All-New Nova T600(R) With Multi-Channel Reflectometry
REHOVOT, Israel, July 11, 2011/PRNewswire-FirstCall/ --
- Innovative and unique optical configuration enables the move
to vertical devices in next-generation memory and microprocessor chips
- Built to Nova industry-leading stability and reliability
standards
- Extends range of Nova's market leading high productivity Optical
CD solutions
Nova Measuring Instruments Ltd. (NASDAQ: NVMI) provider of leading edge
stand-alone metrology and the market leader of integrated metrology
solutions to the semiconductor process control market, today announced the
introduction of an innovative product for process control of complex
vertical structures for the 22nm technology node and beyond. The powerful
new Nova T600 Optical Critical Dimension (Optical CD) metrology system,
developed in collaboration with leading device makers, has shown
breakthrough metrology performance on critical device parameters. During
evaluations with leading memory and foundry customers significant
improvements were demonstrated, including up to 4 times increase in
measurement sensitivity on critical profile parameters of advanced 3D
applications.
As chipmakers strive to follow Moore's Law and continue to shrink device
area, process architecture is driven to increasingly more complex 3D
structures, such as FinFET, Stacked NAND, and Buried-Gate DRAM. Optical CD
is the only known method to non-destructively measure and control these
vertical processes. The newly introduced Nova T600 is the first Optical CD
system to feature oblique incidence spectroscopic reflectometry. Combined
with a normal-incidence reflectometer, this multi-channel reflectometry
configuration is optimized for best sensitivity on small features, including
at the bottom of high-aspect-ratio structures.
The exceptionally high signal-to-noise extracted by the Nova T600
provides superior performance on the full range of profile metrology
applications. Measurement precision and accuracy are further enhanced by
innovative new algorithms included in the next version of the NovaMARS
application development software, soon to be announced. The concurrent
optimization of information from multiple sources, a concept introduced by
Nova as the Holistic Metrology Approach, is now fully supported by the
combination of Nova T600 and NovaMARS.
Nova T600 is designed to meet the challenging cost of ownership
requirements of semiconductor customers. This was achieved through a
combination of high TPT, Modular Metrology[TM], and the flexibility to
optimize optical configuration and tool type to best serve application
needs. Nova T600 metrology units fit into the full frame low vibration
T-platform, designed with a Modular Metrology concept that provides
unrivaled cost effectiveness. T-platform can be configured to support
multiple load ports and multiple measurement units - any combination of Nova
T600 and Nova T500.
Eitan Oppenhaim, Executive Vice President of Global Business, said: "We
see critical importance in bringing to the market at this time a system that
enables production of 3D devices. This major transition of the industry
after 50 years of planar transistors is truly a revolution, and the Nova
T600 allows us to actively participate in this revolution. We are excited to
introduce this latest metrology innovation from Nova, extending our product
portfolio going forward in order to address the challenging demands of
advanced nodes and complex structures below 22nm."
About Nova: Nova Measuring Instruments Ltd. develops, produces and
markets advanced integrated and stand alone metrology solutions for the
semiconductor manufacturing industry. Nova is traded on the NASDAQ & TASE
under the symbol NVMI. The Company's website is http://www.nova.co.il.
This press release contains forward-looking statements within the
meaning of safe harbor provisions of the Private Securities Litigation
Reform Act of 1995 relating to future events or our future performance, such
as statements regarding trends, demand for our products, expected
deliveries, transaction, expected revenues, operating results, earnings and
profitability. Forward-looking statements involve known and unknown risks,
uncertainties and other factors that may cause our actual results, levels of
activity, performance or achievements to be materially different from any
future results, levels of activity, performance or achievements expressed or
implied in those forward looking statements. These risks and other factors
include but are not limited to: our dependency on two product lines; the
highly cyclical nature of the markets we target; our inability to reduce
spending during a slowdown in the semiconductor industry; our ability to
respond effectively on a timely basis to rapid technological changes; our
dependency on OEM suppliers; our ability to retain our competitive position
despite the ongoing consolidation in our industry; risks associated with our
dependence on a single manufacturing facility; our ability to expand our
manufacturing capacity or marketing efforts to support our future growth;
our dependency on a small number of large customers and small number of
suppliers; our dependency on our key employees; risks related to changes in
our order backlog; risks related to the financial, political and
environmental instabilities that may affect our sales in Asia; risks related
to our intellectual property; changes in customer demands for our products;
new product offerings from our competitors; changes in or an inability to
execute our business strategy; unanticipated manufacturing or supply
problems; changes in tax requirements; changes in customer demand for our
products; risks related to currency fluctuations; and risks related to our
operations in Israel. We cannot guarantee future results, levels of
activity, performance or achievements. The matters discussed in this press
release also involve risks and uncertainties summarized under the heading
"Risk Factors" in Nova's Annual Report on Form 20-F for the year ended
December 31,2010 filed with the Securities and Exchange Commission on March
30, 2011. These factors are updated from time to time through the filing of
reports and registration statements with the Securities and Exchange
Commission. Nova Measuring Instruments Ltd. does not assume any obligation
to update the forward-looking information contained in this press release.
Company Contact:
Dror David, Chief Financial Officer
Nova Measuring Instruments Ltd.
Tel: +1-972-8-938-7505
E-mail: info@nova.co.il
http://www.nova.co.il
Investor Relations Contacts:
Ehud Helft / Kenny Green
CCG Investor Relations
Tel: +1-646-201-9246
E-mail: nova@ccgisrael.com
Source: Nova Measuring Instruments Ltd
.
Introducing the All-New Nova T600(R) With Multi-Channel Reflectometry
REHOVOT, Israel, July 11, 2011/PRNewswire-FirstCall/ --
- Innovative and unique optical configuration enables the move
to vertical devices in next-generation memory and microprocessor chips
- Built to Nova industry-leading stability and reliability
standards
- Extends range of Nova's market leading high productivity Optical
CD solutions
Nova Measuring Instruments Ltd. (NASDAQ: NVMI) provider of leading edge
stand-alone metrology and the market leader of integrated metrology
solutions to the semiconductor process control market, today announced the
introduction of an innovative product for process control of complex
vertical structures for the 22nm technology node and beyond. The powerful
new Nova T600 Optical Critical Dimension (Optical CD) metrology system,
developed in collaboration with leading device makers, has shown
breakthrough metrology performance on critical device parameters. During
evaluations with leading memory and foundry customers significant
improvements were demonstrated, including up to 4 times increase in
measurement sensitivity on critical profile parameters of advanced 3D
applications.
As chipmakers strive to follow Moore's Law and continue to shrink device
area, process architecture is driven to increasingly more complex 3D
structures, such as FinFET, Stacked NAND, and Buried-Gate DRAM. Optical CD
is the only known method to non-destructively measure and control these
vertical processes. The newly introduced Nova T600 is the first Optical CD
system to feature oblique incidence spectroscopic reflectometry. Combined
with a normal-incidence reflectometer, this multi-channel reflectometry
configuration is optimized for best sensitivity on small features, including
at the bottom of high-aspect-ratio structures.
The exceptionally high signal-to-noise extracted by the Nova T600
provides superior performance on the full range of profile metrology
applications. Measurement precision and accuracy are further enhanced by
innovative new algorithms included in the next version of the NovaMARS
application development software, soon to be announced. The concurrent
optimization of information from multiple sources, a concept introduced by
Nova as the Holistic Metrology Approach, is now fully supported by the
combination of Nova T600 and NovaMARS.
Nova T600 is designed to meet the challenging cost of ownership
requirements of semiconductor customers. This was achieved through a
combination of high TPT, Modular Metrology[TM], and the flexibility to
optimize optical configuration and tool type to best serve application
needs. Nova T600 metrology units fit into the full frame low vibration
T-platform, designed with a Modular Metrology concept that provides
unrivaled cost effectiveness. T-platform can be configured to support
multiple load ports and multiple measurement units - any combination of Nova
T600 and Nova T500.
Eitan Oppenhaim, Executive Vice President of Global Business, said: "We
see critical importance in bringing to the market at this time a system that
enables production of 3D devices. This major transition of the industry
after 50 years of planar transistors is truly a revolution, and the Nova
T600 allows us to actively participate in this revolution. We are excited to
introduce this latest metrology innovation from Nova, extending our product
portfolio going forward in order to address the challenging demands of
advanced nodes and complex structures below 22nm."
About Nova: Nova Measuring Instruments Ltd. develops, produces and
markets advanced integrated and stand alone metrology solutions for the
semiconductor manufacturing industry. Nova is traded on the NASDAQ & TASE
under the symbol NVMI. The Company's website is http://www.nova.co.il.
This press release contains forward-looking statements within the
meaning of safe harbor provisions of the Private Securities Litigation
Reform Act of 1995 relating to future events or our future performance, such
as statements regarding trends, demand for our products, expected
deliveries, transaction, expected revenues, operating results, earnings and
profitability. Forward-looking statements involve known and unknown risks,
uncertainties and other factors that may cause our actual results, levels of
activity, performance or achievements to be materially different from any
future results, levels of activity, performance or achievements expressed or
implied in those forward looking statements. These risks and other factors
include but are not limited to: our dependency on two product lines; the
highly cyclical nature of the markets we target; our inability to reduce
spending during a slowdown in the semiconductor industry; our ability to
respond effectively on a timely basis to rapid technological changes; our
dependency on OEM suppliers; our ability to retain our competitive position
despite the ongoing consolidation in our industry; risks associated with our
dependence on a single manufacturing facility; our ability to expand our
manufacturing capacity or marketing efforts to support our future growth;
our dependency on a small number of large customers and small number of
suppliers; our dependency on our key employees; risks related to changes in
our order backlog; risks related to the financial, political and
environmental instabilities that may affect our sales in Asia; risks related
to our intellectual property; changes in customer demands for our products;
new product offerings from our competitors; changes in or an inability to
execute our business strategy; unanticipated manufacturing or supply
problems; changes in tax requirements; changes in customer demand for our
products; risks related to currency fluctuations; and risks related to our
operations in Israel. We cannot guarantee future results, levels of
activity, performance or achievements. The matters discussed in this press
release also involve risks and uncertainties summarized under the heading
"Risk Factors" in Nova's Annual Report on Form 20-F for the year ended
December 31,2010 filed with the Securities and Exchange Commission on March
30, 2011. These factors are updated from time to time through the filing of
reports and registration statements with the Securities and Exchange
Commission. Nova Measuring Instruments Ltd. does not assume any obligation
to update the forward-looking information contained in this press release.
Company Contact:
Dror David, Chief Financial Officer
Nova Measuring Instruments Ltd.
Tel: +1-972-8-938-7505
E-mail: info@nova.co.il
http://www.nova.co.il
Investor Relations Contacts:
Ehud Helft / Kenny Green
CCG Investor Relations
Tel: +1-646-201-9246
E-mail: nova@ccgisrael.com
Source: Nova Measuring Instruments Ltd
.