Nova Unveils Multi-Channel NovaMARS(R) Software Engine for Advanced 3D Structures
Poster: SySAdmin
Posted on July 12, 2011 at 4:14:01 AM
Nova Unveils Multi-Channel NovaMARS(R) Software Engine for Advanced 3D Structures
REHOVOT, Israel, July 12, 2011/PRNewswire-FirstCall/ --
Nova Measuring Instruments Ltd. (NASDAQ: NVMI) provider of leading edge
stand-alone metrology and the market leader of integrated metrology
solutions to the semiconductor process control market, today introduced its
fifth generation of the award-winning NovaMARS Optical CD application
development solution. The new NovaMARS 5.0 is geared towards addressing the
industry's transition to novel chip design concepts such as 3D gates,
recently introduced as part of the transition to sub-30nm technology nodes,
in both memory and logic. The NovaMARS 5.0 is optimized for speed of recipe
development, ease of use, and accuracy of solution for the most complex 3D
scatterometry applications for the 2x and 1x technology nodes.
The new NovaMARS 5.0 scatterometry engine has the ability to combine
data from multiple optical channels directly on the tool during measurement.
This multi-channel capability complements existing Holistic Metrology
elements, which are part of Nova's product offering, such as injection,
multi-stack, and global fit. Together, these elements provide the most
comprehensive algorithmic solution to date for the development of
scatterometry applications. More detailed reproduction of complex 3D
structures is now possible by extraction of fine shape parameters, enabling
process control of advanced devices like FinFET non-planar transistors.
Algorithmic advancements on NovaMARS 5.0 provide significant reduction
in time to solution. Included is a new NovaMARS StackMaker? designer for
scatterometry models that allows simple drag-and-drop design and
visualization of very complex 3D device geometries, making it easy for users
to track and implement design and process changes into existing models, as
well as create new models. The industry-leading NovaMARS MatMaker?
materials characterization package, already implemented in previous NovaMARS
versions, receives an order-of-magnitude faster regression engine allowing
for fast convergence to the correct materials and correct solution. Multiple
enhancements to spectral matching routines complete the package.
"Since its introduction more than a decade ago scatterometry has made
significant progress towards maturity. Originally billed as a faster and
more cost-effective replacement to incumbent CD-SEM technology, today
scatterometry is able to measure embedded details and critical profile
parameters of complex 3D device structures. Reliable measurements of such
details, that are practically invisible by any other technique, make
scatterometry an indispensable instrument for both device development and
process control", said Eitan Oppenheim, Executive Vice President, Global
Business Group.
"Advanced process development is characterized by frequent changes to
structures and metrology requirements. Scatterometry solutions have to keep
up by providing fast and accurate profile information. By speeding up recipe
creation and allowing timely device profile measurements, NovaMARS 5.0 now
enables our customers to utilize the power of scatterometry to shorten the
process development cycle. Users will experience up to 10 times improvement
in time to solution when using the new version. In conjunction with the new
Nova T600 measurement tool, NovaMARS 5.0 users achieved a 4 times
improvement in measurement sensitivity to critical parameters of complex
applications".
NovaMARS 5.0 is compatible with existing NovaScan and T-platform
scatterometry tools, and is a critical enabler for the new Nova T600
measurement tool.
For additional details about NovaMARS 5.0, please visit
http://www.nova.co.il.
About Nova: Nova Measuring Instruments Ltd. develops, produces and
markets advanced integrated and stand alone metrology solutions for the
semiconductor manufacturing industry. Nova is traded on the NASDAQ & TASE
under the symbol NVMI. The Company's website is http://www.nova.co.il.
This press release contains forward-looking statements within the
meaning of safe harbor provisions of the Private Securities Litigation
Reform Act of 1995 relating to future events or our future performance, such
as statements regarding trends, demand for our products, expected
deliveries, transaction, expected revenues, operating results, earnings and
profitability. Forward-looking statements involve known and unknown risks,
uncertainties and other factors that may cause our actual results, levels of
activity, performance or achievements to be materially different from any
future results, levels of activity, performance or achievements expressed or
implied in those forward looking statements. These risks and other factors
include but are not limited to: our dependency on two product lines; the
highly cyclical nature of the markets we target; our inability to reduce
spending during a slowdown in the semiconductor industry; our ability to
respond effectively on a timely basis to rapid technological changes; our
dependency on OEM suppliers; our ability to retain our competitive position
despite the ongoing consolidation in our industry; risks associated with our
dependence on a single manufacturing facility; our ability to expand our
manufacturing capacity or marketing efforts to support our future growth;
our dependency on a small number of large customers and small number of
suppliers; our dependency on our key employees; risks related to changes in
our order backlog; risks related to the financial, political and
environmental instabilities that may affect our sales in Asia; risks related
to our intellectual property; changes in customer demands for our products;
new product offerings from our competitors; changes in or an inability to
execute our business strategy; unanticipated manufacturing or supply
problems; changes in tax requirements; changes in customer demand for our
products; risks related to currency fluctuations; and risks related to our
operations in Israel. We cannot guarantee future results, levels of
activity, performance or achievements. The matters discussed in this press
release also involve risks and uncertainties summarized under the heading
"Risk Factors" in Nova's Annual Report on Form 20-F for the year ended
December 31,2010 filed with the Securities and Exchange Commission on March
30, 2011. These factors are updated from time to time through the filing of
reports and registration statements with the Securities and Exchange
Commission. Nova Measuring Instruments Ltd. does not assume any obligation
to update the forward-looking information contained in this press release.
Company Contact:
Dror David, Chief Financial Officer
Nova Measuring Instruments Ltd.
Tel: +972-8-938-7505
E-mail: info@nova.co.il
http://www.nova.co.il
Investor Relations Contacts:
Ehud Helft / Kenny Green
CCG Investor Relations
Tel: +1-646-201-9246
E-mail: nova@ccgisrael.com
Source: Nova Measuring Instruments Ltd
.
REHOVOT, Israel, July 12, 2011/PRNewswire-FirstCall/ --
Nova Measuring Instruments Ltd. (NASDAQ: NVMI) provider of leading edge
stand-alone metrology and the market leader of integrated metrology
solutions to the semiconductor process control market, today introduced its
fifth generation of the award-winning NovaMARS Optical CD application
development solution. The new NovaMARS 5.0 is geared towards addressing the
industry's transition to novel chip design concepts such as 3D gates,
recently introduced as part of the transition to sub-30nm technology nodes,
in both memory and logic. The NovaMARS 5.0 is optimized for speed of recipe
development, ease of use, and accuracy of solution for the most complex 3D
scatterometry applications for the 2x and 1x technology nodes.
The new NovaMARS 5.0 scatterometry engine has the ability to combine
data from multiple optical channels directly on the tool during measurement.
This multi-channel capability complements existing Holistic Metrology
elements, which are part of Nova's product offering, such as injection,
multi-stack, and global fit. Together, these elements provide the most
comprehensive algorithmic solution to date for the development of
scatterometry applications. More detailed reproduction of complex 3D
structures is now possible by extraction of fine shape parameters, enabling
process control of advanced devices like FinFET non-planar transistors.
Algorithmic advancements on NovaMARS 5.0 provide significant reduction
in time to solution. Included is a new NovaMARS StackMaker? designer for
scatterometry models that allows simple drag-and-drop design and
visualization of very complex 3D device geometries, making it easy for users
to track and implement design and process changes into existing models, as
well as create new models. The industry-leading NovaMARS MatMaker?
materials characterization package, already implemented in previous NovaMARS
versions, receives an order-of-magnitude faster regression engine allowing
for fast convergence to the correct materials and correct solution. Multiple
enhancements to spectral matching routines complete the package.
"Since its introduction more than a decade ago scatterometry has made
significant progress towards maturity. Originally billed as a faster and
more cost-effective replacement to incumbent CD-SEM technology, today
scatterometry is able to measure embedded details and critical profile
parameters of complex 3D device structures. Reliable measurements of such
details, that are practically invisible by any other technique, make
scatterometry an indispensable instrument for both device development and
process control", said Eitan Oppenheim, Executive Vice President, Global
Business Group.
"Advanced process development is characterized by frequent changes to
structures and metrology requirements. Scatterometry solutions have to keep
up by providing fast and accurate profile information. By speeding up recipe
creation and allowing timely device profile measurements, NovaMARS 5.0 now
enables our customers to utilize the power of scatterometry to shorten the
process development cycle. Users will experience up to 10 times improvement
in time to solution when using the new version. In conjunction with the new
Nova T600 measurement tool, NovaMARS 5.0 users achieved a 4 times
improvement in measurement sensitivity to critical parameters of complex
applications".
NovaMARS 5.0 is compatible with existing NovaScan and T-platform
scatterometry tools, and is a critical enabler for the new Nova T600
measurement tool.
For additional details about NovaMARS 5.0, please visit
http://www.nova.co.il.
About Nova: Nova Measuring Instruments Ltd. develops, produces and
markets advanced integrated and stand alone metrology solutions for the
semiconductor manufacturing industry. Nova is traded on the NASDAQ & TASE
under the symbol NVMI. The Company's website is http://www.nova.co.il.
This press release contains forward-looking statements within the
meaning of safe harbor provisions of the Private Securities Litigation
Reform Act of 1995 relating to future events or our future performance, such
as statements regarding trends, demand for our products, expected
deliveries, transaction, expected revenues, operating results, earnings and
profitability. Forward-looking statements involve known and unknown risks,
uncertainties and other factors that may cause our actual results, levels of
activity, performance or achievements to be materially different from any
future results, levels of activity, performance or achievements expressed or
implied in those forward looking statements. These risks and other factors
include but are not limited to: our dependency on two product lines; the
highly cyclical nature of the markets we target; our inability to reduce
spending during a slowdown in the semiconductor industry; our ability to
respond effectively on a timely basis to rapid technological changes; our
dependency on OEM suppliers; our ability to retain our competitive position
despite the ongoing consolidation in our industry; risks associated with our
dependence on a single manufacturing facility; our ability to expand our
manufacturing capacity or marketing efforts to support our future growth;
our dependency on a small number of large customers and small number of
suppliers; our dependency on our key employees; risks related to changes in
our order backlog; risks related to the financial, political and
environmental instabilities that may affect our sales in Asia; risks related
to our intellectual property; changes in customer demands for our products;
new product offerings from our competitors; changes in or an inability to
execute our business strategy; unanticipated manufacturing or supply
problems; changes in tax requirements; changes in customer demand for our
products; risks related to currency fluctuations; and risks related to our
operations in Israel. We cannot guarantee future results, levels of
activity, performance or achievements. The matters discussed in this press
release also involve risks and uncertainties summarized under the heading
"Risk Factors" in Nova's Annual Report on Form 20-F for the year ended
December 31,2010 filed with the Securities and Exchange Commission on March
30, 2011. These factors are updated from time to time through the filing of
reports and registration statements with the Securities and Exchange
Commission. Nova Measuring Instruments Ltd. does not assume any obligation
to update the forward-looking information contained in this press release.
Company Contact:
Dror David, Chief Financial Officer
Nova Measuring Instruments Ltd.
Tel: +972-8-938-7505
E-mail: info@nova.co.il
http://www.nova.co.il
Investor Relations Contacts:
Ehud Helft / Kenny Green
CCG Investor Relations
Tel: +1-646-201-9246
E-mail: nova@ccgisrael.com
Source: Nova Measuring Instruments Ltd
.