Nova and imec Developed Innovative Scatterometry Approach for Self-Aligned Quadruple Patterning (SAQP) Process Control

Nova and imec Developed Innovative Scatterometry Approach for Self-Aligned Quadruple Patterning (SAQP) Process Control

SAN JOSE, California, February 22, 2016 /PRNewswire/ --

    Nano-electronics research center imec and Nova Measuring Instruments (Nasdaq: NVMI), a
leading innovator and key provider of metrology solutions for advanced process control
used in semiconductor manufacturing, announced today at the SPIE advanced lithography
conference that they are jointly developing an innovative scatterometry approach to enable
SAQP process control. The initial results will be presented during the conference.  

    As 193nm immersion lithography is reaching its optical resolution limit using single
exposure, advanced multipatterning concepts are studied to reach lower nodes. Targeting
the N7 node, self-aligned quadruple patterning (SAQP) is an advanced patterning approach
that uses pitch splitting to extend the capability of double patterning (SADP) 193nm
immersion lithography. Nova and imec jointly developed an approach based on scatterometry
technology to determine the main contributors to the CD (critical dimension) variation
between different populations of lines and spaces. Using parallel interpretation of
multiple scatterometry targets with slightly variable pitches, the researchers revealed
that scatterometry is capable of measuring different space populations, and the developed
metrology solutions can be utilized to monitor and control each process step of SAQP
patterning.

    "Collaborating with Nova has enabled us to develop a method to improve process control
in SAQP for the most advanced nodes," said An Steegen, senior vice president process
technology at imec. "Such collaboration is helping the entire semiconductor industry to
lower risks and shorten the time to market for the next generation technologies by
delivering innovative metrology solutions for the key process control challenges ahead."

    "We are excited with the opportunity to collaborate with imec, join its Affiliation
Program and demonstrate the value of our optical CD for early R&D stages," said Dr. Shay
Wolfling, Nova's CTO. "We believe that the growing process challenges arising from the
advance technology nodes require close partnership between research centers, customers and
vendors and this is part of Nova's stated long-term strategy. Such collaboration with imec,
early in the development cycle, allows us to align our technology roadmap accordingly and
contribute to our customers' success."

    About Nova: Nova Measuring Instrument Ltd. delivers continuous innovation by providing
advanced metrology solutions for the semiconductor manufacturing industry. Deployed with
the world's largest integrated-circuit manufacturers, Nova's products deliver
state-of-the-art, high-performance metrology solutions for effective process control
throughout the semiconductor fabrication lifecycle. Nova's product portfolio, which
combines high-precision hardware and cutting-edge software, supports the development and
production of the most advanced devices in today's high-end semiconductor market. Nova's
technical innovation and market leadership enable customers to improve process performance,
enhance products' yields and accelerate time to market. Nova acts as a partner to
semiconductor manufacturers from its offices around the world. Additional information may
be found at http://www.novameasuring.com

    About imec 

    Imec performs world-leading research in nanoelectronics. Imec leverages its scientific
knowledge with the innovative power of its global partnerships in ICT, healthcare and
energy. Imec delivers industry-relevant technology solutions. In a unique high-tech
environment, its international top talent is committed to providing the building blocks
for a better life in a sustainable society. Imec is headquartered in Leuven, Belgium, and
has offices in Belgium, the Netherlands, Taiwan, USA, China, India and Japan. Its staff of
about 2,200 people includes almost 700 industrial residents and guest researchers. In 2014,
imec's revenue (P&L) totaled 363 million euro. Further information on imec can be found
at http://www.imec.be. Stay up to date about what's happening at imec with the monthly
imec magazine, available for tablets and smartphones (as an app for iOS
[https://itunes.apple.com/us/app/imec-magazine/id751465908?ls=1&mt=8 ] and Android
[https://play.google.com/store/apps/details?id=com.twipemobile.imecmagazine ]), or via the
website http://www.imec.be/imecmagazine 

    Imec is a registered trademark for the activities of IMEC International (a legal
entity set up under Belgian law as a "stichting van openbaar nut"), imec Belgium (IMEC vzw
supported by the Flemish Government), imec the Netherlands (Stichting IMEC Nederland, part
of Holst Centre which is supported by the Dutch Government), imec Taiwan (IMEC Taiwan Co.)
and imec China (IMEC Microelectronics (Shanghai) Co. Ltd.) and imec India (Imec India
Private Limited). 

    This press release contains forward-looking statements within the meaning of safe
harbor provisions of the Private Securities Litigation Reform Act of 1995 relating to
future events or our future performance, such as statements regarding, but are not limited
to, anticipated growth opportunities and projections about our business and its future
revenues, expenses and profitability. Forward-looking statements involve known and unknown
risks, uncertainties and other factors that may cause our actual results, levels of
activity, performance or achievements to be materially different from any future results,
levels of activity, performance or achievements expressed or implied in those forward
looking statements. Factors that may affect our results, performance, circumstances or
achievements include, but are not limited to, the following: our dependency on three
product lines; our dependency on a small number of large customers and small number of
suppliers; the highly cyclical and competitive nature of the markets we target and we
operate in; our inability to reduce spending during a slowdown in the semiconductor
industry; our ability to respond effectively on a timely basis to rapid technological
changes; our ability to recognize the benefits of ReVera acquisition and risks that the
acquisition may disrupt current plans and operations and impact relationships with
customers, distributors and suppliers; our dependency on PEMs; risks related to
exclusivity obligations and non-limited liability that may be included in our commercial
agreements and arrangements; our ability to retain our competitive position despite the
ongoing consolidation in our industry; risks related to our dependence on our
manufacturing facilities; risks related to changes in our order backlog; risks related to
the worldwide financial instabilities; risks related to our intellectual property; new
product offerings from our competitors; unanticipated manufacturing or supply problems;
changes in tax requirements; changes in customer demand for our products; risks related to
currency fluctuations, risks related to acquisitions we may pursue and risks related to
our operations in Israel. We cannot guarantee future results, levels of activity,
performance or achievements. The matters discussed in this press release also involve
risks and uncertainties summarized under the heading "Risk Factors" in Nova's Annual
Report on Form 20-F for the year ended December 31, 2014 filed with the Securities and
Exchange Commission on February 25, 2015. These factors are updated from time to time
through the filing of reports and registration statements with the Securities and Exchange
Commission. Nova Measuring Instruments Ltd. does not assume any obligation to update the
forward-looking information contained in this press release. 

       
         
        Company Contact:

         
        Dror David, Chief Financial Officer 
        Nova Measuring Instruments Ltd. 
        Tel: +972-73-229-5760 
        E-mail: info@novameasuring.com 
        http://www.novameasuring.com

         
        Investor Relations Contacts:

         
        Hayden/ MS-IR LLC 
        Miri Segal 
        Tel: +1-917-607-8654 
        E-mail: msegal@ms-ir.com

         
        Or

         
        Brett Maas 
        Tel: +1-646-536-7331 
        E-mail: brett@haydenir.com 

     

Nova Measuring Instruments